METHOD AND APPARATUS FOR MEASURING THICKNESS OF A TEST OBJECT BETWEEN TWO EDDY CURRENT SENSOR HEADS

Details for Australian Patent Application No. 2003293526 (hide)

Owner APPLIED MATERIALS, INC.

Inventors PHAM, Quyen; GU, Yu, Ping; HUSTON, Joel; SMITH, Paul; MILLER, G., Laurie; LEI, Lawrence, C.; LU, Siqing; CHANG, Yu; MARTNER, Cecilia

Pub. Number AU-A-2003293526

PCT Number PCT/US2003/0395

PCT Pub. Number WO2004/055471

Priority 60/433,429 13.12.02 US; 10/685,210 14.10.03 US

Filing date 12 December 2003

Wipo publication date 9 July 2004

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 60/433,429 13.12.02 US; 10/685,210 14.10.03 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003293526

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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