UNIFORM ETCH SYSTEM

Details for Australian Patent Application No. 2003293396 (hide)

Owner LAM RESEARCH CORPORATION

Inventors LARSON, Dean, J.; KADKHODAYAN, Babak; WU, Di; TAKESHITA, Kenji; YEN, Bi-Ming; SU, Xingcai; DENTY, William, M., Jr.; LOEWENHARDT, Peter

Pub. Number AU-A-2003293396

PCT Number PCT/US2003/0386

PCT Pub. Number WO2004/055855

Priority 10/685,739 14.10.03 US; 10/318,612 13.12.02 US; 10/642,083 14.08.03 US

Filing date 4 December 2003

Wipo publication date 9 July 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 10/685,739 14.10.03 US; 10/318,612 13.12.02 US; 10/642,083 14.08.03 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003293396

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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