MASKS, LITHOGRAPHY DEVICE AND SEMICONDUCTOR COMPONENT

Details for Australian Patent Application No. 2003293308 (hide)

Owner CARL ZEISS SMT AG

Inventors MANN, Hans-Jurgen; LOWISCH, Martin; SINGER, Wolfgang

Pub. Number AU-A-2003293308

PCT Number PCT/EP2003/0103

PCT Pub. Number WO2005/036266

Filing date 17 September 2003

Wipo publication date 27 April 2005

International Classifications

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

22 April 2004 Complete Application Filed

16 June 2005 Application Open to Public Inspection

  Published as AU-A-2003293308

1 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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