COMPOSITION FOR FORMING SILICON#ALUMINUM FILM, SILICON#ALUMINUM FILM AND METHOD FOR FORMING THE SAME

Details for Australian Patent Application No. 2003292754 (hide)

Owner JSR CORPORATION

Inventors MATSUKI, Yasuo; YOKOYAMA, Yasuaki

Pub. Number AU-A-2003292754

PCT Number PCT/JP2003/0165

PCT Pub. Number WO2004/065659

Priority 2003-8933 17.01.03 JP

Filing date 24 December 2003

Wipo publication date 13 August 2004

International Classifications

C23C 018/08 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 2003-8933 17.01.03 JP

16 September 2004 Application Open to Public Inspection

  Published as AU-A-2003292754

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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