DIAMOND FILM-FORMING SILICON AND ITS MANUFACTURING METHOD

Details for Australian Patent Application No. 2003292745 (hide)

Owner EBARA CORPORATION

Inventors SERIKAWA, Roberto Masahiro; ISHIKAWA, Naoki; MISHIMA, Takahiro; FUJIMURA, Hiroyuki

Pub. Number AU-A-2003292745

PCT Number PCT/JP2003/0165

PCT Pub. Number WO2004/059048

Priority 2002-374788 25.12.02 JP

Filing date 24 December 2003

Wipo publication date 22 July 2004

International Classifications

C30B 029/04 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Diamond

C30B 029/06 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Silicon

C23C 016/27 Chemical deposition or plating by decomposition

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 2002-374788 25.12.02 JP

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003292745

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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