PLASMA GENERATOR, OZONE GENERATOR, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Details for Australian Patent Application No. 2003292678 (hide)
International Classifications
Event Publications
22 April 2004 Complete Application Filed
Priority application(s): 2002-379963 27.12.02 JP
2 September 2004 Application Open to Public Inspection
Published as AU-A-2003292678
1 September 2005 Corrigenda
Applications OPI - Name Index Under the name HITACHI KOKUSAI ELECTRIC INC.; SATO, Noriyoshi; MASE, Hiroshi; FUJIWARA, Tamiya, Application No. 2003292678, under INID (71) correct the name to read HITACHI KOKUSAI ELECTRIC INC.; SATO, Noriyoshi; MASE, Hiroshi; FUJIWARA, Tamiya; ADTEC PLASMA TECHNOLOGY CO., LTD.
15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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