GAS FEED LINE STRUCTURE

Details for Australian Patent Application No. 2003292477 (hide)

Owner L'AIR LIQUIDE, SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE

Inventors KIMURA, Takako; SONOBE, Jun; SATO, Hideyuki

Pub. Number AU-A-2003292477

PCT Number PCT/IB2003/0063

PCT Pub. Number WO2004/064125

Priority 2003-004555 10.01.03 JP

Filing date 22 December 2003

Wipo publication date 10 August 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C01B 007/00 Halogens

B01D 039/00 Filtering material for liquid or gaseous fluids

C01B 007/20 Halogens

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 2003-004555 10.01.03 JP

9 September 2004 Application Open to Public Inspection

  Published as AU-A-2003292477

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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