ANNEALING METHOD AND DEVICE

Details for Australian Patent Application No. 2003292427 (hide)

Owner QINETIQ LIMITED

Inventors DONOHUE, Paul, Peter; ANTHONY, Carl, John; TODD, Michael, Andrew

Pub. Number AU-A-2003292427

PCT Number PCT/GB2003/0054

PCT Pub. Number WO2004/055880

Priority 0229427.0 18.12.02 GB

Filing date 16 December 2003

Wipo publication date 9 July 2004

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 0229427.0 18.12.02 GB

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003292427

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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