ETCHING OF ALGAINASSB

Details for Australian Patent Application No. 2003291781 (hide)

Owner LEIV EIRIKSSON NYSKAPING AS

Inventors BUGGE, Renato; FIMLAND, Bjorn-Ove

Pub. Number AU-A-2003291781

PCT Number PCT/NO2003/0004

PCT Pub. Number WO2004/059038

Priority 2002 6261 27.12.02 NO

Filing date 19 December 2003

Wipo publication date 22 July 2004

International Classifications

C23F 001/16 Etching metallic material by chemical means

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/465 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01P 011/00 Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type

H01S 005/323 Semiconductor lasers

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 2002 6261 27.12.02 NO

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003291781

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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