ATOMIC LAYER DEPOSITION USING METAL AMIDINATES

Details for Australian Patent Application No. 2003290956 (hide)

Owner PRESIDENT AND FELLOWS OF HARVARD COLLEGE

Inventors GORDON, Roy, G.; LIM, Booyong, S.

Pub. Number AU-A-2003290956

PCT Number PCT/US2003/0365

PCT Pub. Number WO2004/046417

Priority 60/463,365 16.04.03 US; 60/426,975 15.11.02 US

Filing date 14 November 2003

Wipo publication date 15 June 2004

International Classifications

C23C 016/06 Chemical deposition or plating by decomposition - characterised by the deposition of metallic material

C23C 016/18 Chemical deposition or plating by decomposition - from metallo-organic compounds

C07F 019/00 Metal compounds according to more than one of main groups

C07C 237/00 Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by amino groups

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 60/463,365 16.04.03 US; 60/426,975 15.11.02 US

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2003290956

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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