METHOD, SYSTEM AND MEDIUM FOR CONTROLLING MANUFACTURE PROCESS HAVING MULTIVARIATE INPUT PARAMETERS

Details for Australian Patent Application No. 2003290932 (hide)

Owner APPLIED MATERIALS, INC.

Inventors KOKOTOV, Yuri; ENTIN, Efim; SEROR, Jacques; FISHER, Yossi; SAREL, Shalomo; SHAMUGASUNDRAM, Arulkumar, P.; SCHWARM, Alexander, T.; PAIK, Young, Jeen

Pub. Number AU-A-2003290932

PCT Number PCT/US2003/0365

PCT Pub. Number WO2004/046835

Priority 60/426,393 15.11.02 US

Filing date 14 November 2003

Wipo publication date 15 June 2004

International Classifications

G05B 019/00 Programme-control systems

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 60/426,393 15.11.02 US

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2003290932

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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