METHOD OF USING A SOFT SUBPAD FOR CHEMICAL MECHANICAL POLISHING

Details for Australian Patent Application No. 2003290921 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors GAGLIARDI, John, J.,

Pub. Number AU-A-2003290921

PCT Number PCT/US2003/0364

PCT Pub. Number WO2004/062853

Priority 10/339,963 10.01.03 US

Filing date 17 November 2003

Wipo publication date 10 August 2004

International Classifications

B24D 013/14 Wheels having flexibly-acting working parts, e.g. buffing wheels

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24D 013/12 Wheels having flexibly-acting working parts, e.g. buffing wheels

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 10/339,963 10.01.03 US

9 September 2004 Application Open to Public Inspection

  Published as AU-A-2003290921

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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