ATOMIC LAYER DEPOSITION METHODS

Details for Australian Patent Application No. 2003290815 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors DOAN, Trung, Tri; BLALOCK, Guy, T.; SANDHU, Gurtej, S.

Pub. Number AU-A-2003290815

PCT Number PCT/US2003/0362

PCT Pub. Number WO2004/044963

Priority 10/293,072 12.11.02 US

Filing date 12 November 2003

Wipo publication date 3 June 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 10/293,072 12.11.02 US

8 July 2004 Application Open to Public Inspection

  Published as AU-A-2003290815

28 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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