INTEGRATED PLATING AND PLANARIZATION PROCESS AND APPARATUS THEREFOR

Details for Australian Patent Application No. 2003290804 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors ECONOMIKOS, Laertis; DELIGIANNI, Hariklia; COTTE, John, M.; GRABARZ, Henry, J.; CHEN, Bomy

Pub. Number AU-A-2003290804

PCT Number PCT/US2003/0362

PCT Pub. Number WO2004/046426

Priority 10/294,200 14.11.02 US

Filing date 14 November 2003

Wipo publication date 15 June 2004

International Classifications

C25D 005/22 Electroplating characterised by the process

C25D 005/48 Electroplating characterised by the process - After-treatment of electroplated surfaces

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 10/294,200 14.11.02 US

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2003290804

28 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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