SYSTEM AND METHOD FOR INSPECTION OF A SUBSTRATE THAT HAS A REFRACTIVE INDEX

Details for Australian Patent Application No. 2003290785 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors GUETTA, Avishay; FELDMAN, Haim; NAFTALI, Ron; SHOHAM, Doron

Pub. Number AU-A-2003290785

PCT Number PCT/US2003/0361

PCT Pub. Number WO2004/072627

Priority 60/446,887 11.02.03 US; 10/423,353 25.04.03 US

Filing date 14 November 2003

Wipo publication date 6 September 2004

International Classifications

G01N 021/95 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01N 021/88 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating the presence of flaws, defects or contamination

G02B 027/58 Other optical systems - Optics for apodization or superresolution

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 60/446,887 11.02.03 US; 10/423,353 25.04.03 US

7 October 2004 Application Open to Public Inspection

  Published as AU-A-2003290785

27 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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