SENSOR FOR MONITORING MATERIAL DEPOSITION AND METHOD OF MONITORING MATERIAL DEPOSITION

Details for Australian Patent Application No. 2003290759 (hide)

Owner THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

Inventors LIU, Chang

Pub. Number AU-A-2003290759

PCT Number PCT/US2003/0361

PCT Pub. Number WO2004/053186

Priority 10/309,774 04.12.02 US

Filing date 12 November 2003

Wipo publication date 30 June 2004

International Classifications

C23C 014/52 Coating by vacuum evaporation, by sputtering or by ion implantation - Means for observation of the coating process

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 10/309,774 04.12.02 US

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003290759

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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