METHOD AND APPARATUS FOR PROVIDING AND INTEGRATING A GENERAL METAL DELIVERY SOURCE (GMDS) WITH ATOMIC LAYER DEPOSITION (ALD)

Details for Australian Patent Application No. 2003290694 (hide)

Event Publications

8 April 2004 Complete Application Filed

Priority application(s): 10/295,614 14.11.02 US

8 July 2004 Application Open to Public Inspection

Published as AU-A-2003290694

28 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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