METHOD FOR PRODUCING A DEFINED DOPING REGION IN A SEMICONDUCTOR MATERIAL

Details for Australian Patent Application No. 2003290113 (hide)

Owner AUSTRIAMICROSYSTEMS AG

Inventors KNAIPP, Martin

Pub. Number AU-A-2003290113

PCT Number PCT/EP2003/0147

PCT Pub. Number WO2004/066373

Priority 103 02 632.0 23.01.03 DE

Filing date 22 December 2003

Wipo publication date 13 August 2004

International Classifications

H01L 021/225 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/266 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 103 02 632.0 23.01.03 DE

16 September 2004 Application Open to Public Inspection

  Published as AU-A-2003290113

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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