PROTECTIVE COATING SYSTEM FOR REFLECTIVE OPTICAL ELEMENTS, REFLECTIVE OPTICAL ELEMENT AND METHODS FOR THE PRODUCTION THEREOF

Details for Australian Patent Application No. 2003289957 (hide)

Owner CARL ZEISS SMT AG

Inventors TRENKLER, Johann

Pub. Number AU-A-2003289957

PCT Number PCT/EP2003/0136

PCT Pub. Number WO2004/053540

Priority 102 58 709.4 12.12.02 DE

Filing date 4 December 2003

Wipo publication date 30 June 2004

International Classifications

G02B 005/08 Optical elements other than lenses - Mirrors

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 102 58 709.4 12.12.02 DE

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003289957

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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