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Details for Australian Patent Application No. 2003289933 (hide)

Owner PVT PLASMA UND VAKUUMTECHNIK GMBH

Inventors CURTINS, Hermann

Pub. Number AU-A-2003289933

PCT Number PCT/EP2003/0135

PCT Pub. Number WO2004/051695

Priority 102 56 417.5 02.12.02 DE

Filing date 2 December 2003

Wipo publication date 23 June 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 102 56 417.5 02.12.02 DE

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003289933

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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