METHOD FOR PRODUCING A SUBLITHOGRAPHIC GATE STRUCTURE FOR FIELD EFFECT TRANSISTORS, AND FOR PRODUCING AN ASSOCIATED FIELD EFFECT TRANSISTOR, AN ASSOCIATED INVERTER, AND AN ASSOCIATED INVERTER STRUCTURE

Details for Australian Patent Application No. 2003289828 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors TEWS, Helmut; FEHLHABER, Rodger

Pub. Number AU-A-2003289828

PCT Number PCT/DE2003/0040

PCT Pub. Number WO2004/057660

Priority 102 60 234.4 20.12.02 DE

Filing date 9 December 2003

Wipo publication date 14 July 2004

International Classifications

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 102 60 234.4 20.12.02 DE

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003289828

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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