Owner SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventors GOTO, Yugo; NISHI, Kazuo; TAKAYAMA, Toru

Pub. Number AU-A-2003289448

PCT Number PCT/JP2003/0163

PCT Pub. Number WO2004/068582

Priority 2003-2667 08.01.03 JP

Filing date 19 December 2003

Wipo publication date 23 August 2004

H01L 027/12 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being other than a semiconductor body, e.g. an insulating body

H01L 027/146 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Imager structures

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/786 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof