PROCESSING METHOD AND DEVICE

Details for Australian Patent Application No. 2003289409 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors OKUMOTO, Yasuhiro; KARASAWA, Wataru

Pub. Number AU-A-2003289409

PCT Number PCT/JP2003/0161

PCT Pub. Number WO2004/055877

Priority 2002-365777 17.12.02 JP

Filing date 17 December 2003

Wipo publication date 9 July 2004

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-365777 17.12.02 JP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003289409

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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