METHOD FOR FORMING FILM

Details for Australian Patent Application No. 2003289404 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors HATANO, Tatsuo; KAWANO, Yumiko; YAMASAKI, Hideaki

Pub. Number AU-A-2003289404

PCT Number PCT/JP2003/0161

PCT Pub. Number WO2004/055234

Priority 2002-367073 18.12.02 JP

Filing date 17 December 2003

Wipo publication date 9 July 2004

International Classifications

C23C 016/18 Chemical deposition or plating by decomposition - from metallo-organic compounds

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-367073 18.12.02 JP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003289404

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003289405-Automatic focusing device

2003289403-METHOD OF SEPARATING PRECURSOR CELLS PRODUCING GABAERGIC NERVE CELLS ALONE