SHAPE MEASUREMENT METHOD, SHAPE MEASUREMENT DEVICE, TILT MEASUREMENT METHOD, STAGE DEVICE, EXPOSURE DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Details for Australian Patent Application No. 2003289146 (hide)

Owner NIKON CORPORATION

Inventors KAMIYA, Saburo; KANAKUTSU, Yutaka

Pub. Number AU-A-2003289146

PCT Number PCT/JP2003/0154

PCT Pub. Number WO2004/051184

Priority 2002-351650 03.12.02 JP

Filing date 3 December 2003

Wipo publication date 23 June 2004

International Classifications

G01B 011/00 Measuring arrangements characterised by the use of optical means

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-351650 03.12.02 JP

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003289146

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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