METHOD FOR FORMING TUNGSTEN NITRIDE FILM

Details for Australian Patent Application No. 2003289005 (hide)

Owner ULVAC INC.

Inventors HARADA, Masamichi; KATO, Nobuyuki; MIZUNO, Eiichi; GONOHE, Narishi

Pub. Number AU-A-2003289005

PCT Number PCT/JP2003/0157

PCT Pub. Number WO2004/061154

Priority 2002-379101 27.12.02 JP

Filing date 10 December 2003

Wipo publication date 29 July 2004

International Classifications

C23C 016/34 Chemical deposition or plating by decomposition - Nitrides

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-379101 27.12.02 JP

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003289005

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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