Method for preparing ruthenium oxidethin film using electrodeposition

Details for Australian Patent Application No. 2003288772 (hide)

Owner Korea Institute Of Science And Technology

Inventors Joo, Oh Shim; Jung, Kwang-Deog; Lokhande, C. D.; Park, Bong-Ok

Pub. Number AU-A-2003288772

PCT Number PCT/KR2003/0028

PCT Pub. Number WO2005/050721

Priority 10-2003-0082026 19.11.03 KR

Filing date 30 December 2003

Wipo publication date 8 June 2005

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10-2003-0082026 19.11.03 KR

1 September 2005 Application Open to Public Inspection

  Published as AU-A-2003288772

3 August 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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