METHODS AND SYSTEMS FOR SUPPORTING A WORKPIECE AND FOR HEAT-TREATING THE WORKPIECE

Details for Australian Patent Application No. 2003287837 (hide)

Owner VORTEK INDUSTRIES LTD

Inventors KOMASA, Tony; RUDOLPH, Marc; CIBERE, Joseph; CAMM, David, Malcolm; SEMPERE, Guillaume; KALUDJERCIC, Ljubomir; STUART, Gregory; BUMBULOVIC, Mladen; TRAN, Tim; DETS, Sergiy

Pub. Number AU-A-2003287837

PCT Number PCT/CA2003/0019

PCT Pub. Number WO2004/057650

Priority 60/434,670 20.12.02 US; 60/468,659 08.05.03 US

Filing date 19 December 2003

Wipo publication date 14 July 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 60/434,670 20.12.02 US; 60/468,659 08.05.03 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003287837

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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