METHODS FOR FORMING COPPER INTERCONNECT STRUCTURES BY CO-PLATING OF NOBLE METALS AND STRUCTURES FORMED THEREBY

Details for Australian Patent Application No. 2003287704 (hide)

Owner INTEL CORPORATION

Inventors DUBIN, Valery

Pub. Number AU-A-2003287704

PCT Number PCT/US2003/0360

PCT Pub. Number WO2004/053202

Priority 10/313,760 05.12.02 US

Filing date 6 November 2003

Wipo publication date 30 June 2004

International Classifications

C25D 003/58 Electroplating

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

C23C 018/48 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10/313,760 05.12.02 US

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003287704

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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