RASTER FRAME BEAM SYSTEM FOR ELECTRON BEAM LITHOGRAPHY

Details for Australian Patent Application No. 2003286838 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors ALONI, Meir; FREIDMAN, Mula; VISHNIPOLSKY, Jimmy; ALMOGY, Gilad; LITMAN, Alon; LEHMAN, Yonatan; MESHULACH, Doron

Pub. Number AU-A-2003286838

PCT Number PCT/US2003/0347

PCT Pub. Number WO2004/044944

Priority 10/289,209 07.11.02 US; 60/430,005 02.12.02 US; 60/449,236 20.02.03 US; 60/479,756 18.06.03 US

Filing date 31 October 2003

Wipo publication date 3 June 2004

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10/289,209 07.11.02 US; 60/430,005 02.12.02 US; 60/449,236 20.02.03 US; 60/479,756 18.06.03 US

8 July 2004 Application Open to Public Inspection

  Published as AU-A-2003286838

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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