SUBSTRATE PROCESSING APPARATUS AND METHOD

Details for Australian Patent Application No. 2003286823 (hide)

Owner LAM RESEARCH CORPORATION

Inventors KOBAYASHI, Naoaki; YAMAGUCHI, Ryuta; TAJIMA, Kaori; ORI, Kohsuke

Pub. Number AU-A-2003286823

PCT Number PCT/US2003/0347

PCT Pub. Number WO2004/041454

Priority 2002-318875 31.10.02 JP

Filing date 30 October 2003

Wipo publication date 7 June 2004

International Classifications

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

B08B 007/04 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by a combination of operations

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-318875 31.10.02 JP

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2003286823

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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