METHODS FOR POLISHING AND/OR CLEANING COPPER INTERCONNECTS AND/OR FILM AND COMPOSITIONS THEREFOR

Details for Australian Patent Application No. 2003286734 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors ZAZZERA, Lawrence, A.; KESARI, Susrut; LAMANNA, William, M.; PARENT, Michael, J.

Pub. Number AU-A-2003286734

PCT Number PCT/US2003/0342

PCT Pub. Number WO2004/061028

Priority 10/319,954 16.12.02 US

Filing date 28 October 2003

Wipo publication date 29 July 2004

International Classifications

C09G 001/02 Polishing compositions

C23F 003/00 Brightening metals by chemical means

C11D 001/00 Surface-active non-soap detergents

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10/319,954 16.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003286734

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003286735-BUSHING WITH PERFORMANCE TUNING FEATURES

2003286733-STEPPED ACCESSORY RECEIVER