SEMICONDUCTOR MANUFACTURING FACILITY AND PROCESS SYSTEMS UTILIZING EXHAUST RECIRCULATION

Details for Australian Patent Application No. 2003286599 (hide)

International Classifications

Event Publications

1 April 2004 Complete Application Filed

Priority application(s): 10/284,910 31.10.02 US; 10/672,051 26.09.03 US

1 July 2004 Application Open to Public Inspection

Published as AU-A-2003286599

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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