PROCESS FOR PRODUCING CRYSTALLINE THIN FILM

Details for Australian Patent Application No. 2003286430 (hide)

Owner CANON KABUSHIKI KAISHA

Inventors KUMOMI, Hideya

Pub. Number AU-A-2003286430

PCT Number PCT/JP2003/0157

PCT Pub. Number WO2004/053962

Priority 2002-358162 10.12.02 JP; 2003-165856 11.06.03 JP

Filing date 9 December 2003

Wipo publication date 30 June 2004

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 013/22 Single-crystal growth by zone-melting

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-358162 10.12.02 JP; 2003-165856 11.06.03 JP

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003286430

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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