Method of etching a semiconductor device

Details for Australian Patent Application No. 2003285846 (hide)

Owner Systems On Silicon Manufacturing Co. Pte. Ltd.

Inventors Ng, Khim Hong; Pong, Chin Ling

Pub. Number AU-A-2003285846

PCT Number PCT/SG2003/0002

PCT Pub. Number WO2005/062363

Filing date 23 December 2003

Wipo publication date 14 July 2005

International Classifications

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

1 September 2005 Application Open to Public Inspection

  Published as AU-A-2003285846

7 September 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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