APPARATUS AND METHOD FOR SHIELDING A WAFER FROM CHARGED PARTICLES DURING PLASMA ETCHING

Details for Australian Patent Application No. 2003285581 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors WISE, Richard; YAN, Hongwen; JI, Brian; PANDA, Siddhartha; CHEN, Bomy

Pub. Number AU-A-2003285581

PCT Number PCT/GB2003/0052

PCT Pub. Number WO2004/053922

Priority 10/314,497 06.12.02 US

Filing date 2 December 2003

Wipo publication date 30 June 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10/314,497 06.12.02 US

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003285581

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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