SUPERCRITICAL CARBON DIOXIDE/ CHEMICAL FORMULATION FOR ASHED AND UNASHED ALUMINUM POST-ETCH RESIDUE REMOVAL

Details for Australian Patent Application No. 2003284932 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors XU, Chongying; BAUM, Thomas, H.; KORZENSKI, Michael, B.; GHENCIU, Eliodor, G.

Pub. Number AU-A-2003284932

PCT Number PCT/US2003/0338

PCT Pub. Number WO2004/041965

Priority 10/285,015 31.10.02 US

Filing date 27 October 2003

Wipo publication date 7 June 2004

International Classifications

C09K 013/00 Etching, surface-brightening or pickling compositions

C09K 013/08 Etching, surface-brightening or pickling compositions

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C03C 015/00 Surface treatment of glass

C09K 013/04 Etching, surface-brightening or pickling compositions

C09K 013/06 Etching, surface-brightening or pickling compositions

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 10/285,015 31.10.02 US

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2003284932

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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