METHOD AND APPARATUS FOR DETECTING ENDPOINT DURING PLASMA ETCHING OF THIN FILMS
Details for Australian Patent Application No. 2003284890 (hide)
International Classifications
Event Publications
1 April 2004 Complete Application Filed
Priority application(s): 60/421,422 24.10.02 US; 10/401,114 27.03.03 US
17 June 2004 Application Open to Public Inspection
Published as AU-A-2003284890
21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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