SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Details for Australian Patent Application No. 2003284537 (hide)

Owner S.E.S. CO., LTD.

Inventors KAWATE, Munenori; NAKATSUKASA, Katsuyoshi; OGASAWARA, Kazuhisa; SAKAIHARA, Yoshiaki; HARUKI, Yoshihiro

Pub. Number AU-A-2003284537

PCT Number PCT/JP2003/0154

PCT Pub. Number WO2005/004217

Priority 2003-190654 02.07.03 JP

Filing date 2 December 2003

Wipo publication date 21 January 2005

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 2003-190654 02.07.03 JP

3 March 2005 Application Open to Public Inspection

  Published as AU-A-2003284537

16 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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