INSULATING FILM MATERIAL CONTAINING ORGANIC SILANE OR ORGANIC SILOXANE COMPOUND, METHOD FOR PRODUCING SAME, AND SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003284500 (hide)

Owner TOSOH CORPORATION

Inventors HARA, Daiji; YOSHIDA, Keisuke

Pub. Number AU-A-2003284500

PCT Number PCT/JP2003/0152

PCT Pub. Number WO2004/049422

Priority 2002-346226 28.11.02 JP; 2003-198654 17.07.03 JP

Filing date 28 November 2003

Wipo publication date 18 June 2004

International Classifications

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C07F 007/18 Compounds containing elements of the 4th Group of the Periodic System

C07F 007/21 Compounds containing elements of the 4th Group of the Periodic System

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 2002-346226 28.11.02 JP; 2003-198654 17.07.03 JP

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003284500

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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