METHOD OF PLASMA DOPING

Details for Australian Patent Application No. 2003284404 (hide)

Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors SASAKI, Yuichiro; MIZUNO, Bunji; NAKAYAMA, Ichiro; KANADA, Hisataka; OKUMURA, Tomohiro

Pub. Number AU-A-2003284404

PCT Number PCT/JP2003/0146

PCT Pub. Number WO2004/051720

Priority 2002-347177 29.11.02 JP

Filing date 18 November 2003

Wipo publication date 23 June 2004

International Classifications

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 2002-347177 29.11.02 JP

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003284404

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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