METHODS FOR POLISHING AND/OR CLEANING COPPER INTERCONNECTS AND/OR FILM AND COMPOSITIONS THEREFOR

Details for Australian Patent Application No. 2003284355 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors KESARI, Susrut; ZAZZERA, Lawrence, A.; PARENT, Michael, J.; LAMANNA, William, M.

Pub. Number AU-A-2003284355

PCT Number PCT/US2003/0338

PCT Pub. Number WO2004/061027

Priority 10/320,254 16.12.02 US

Filing date 24 October 2003

Wipo publication date 29 July 2004

International Classifications

C09G 001/02 Polishing compositions

C23F 003/00 Brightening metals by chemical means

C11D 001/00 Surface-active non-soap detergents

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 10/320,254 16.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003284355

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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