SCANNING ELECTRON MICROSCOPE HAVING MULTIPLE DETECTORS AND A METHOD FOR MULTIPLE DETECTOR BASED IMAGING

Details for Australian Patent Application No. 2003284339 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors SHEMESH, Dror; ADAMEC, Pavel

Pub. Number AU-A-2003284339

PCT Number PCT/US2003/0336

PCT Pub. Number WO2005/017511

Priority 60/491,618 30.07.03 US

Filing date 22 October 2003

Wipo publication date 7 March 2005

International Classifications

G01N 023/00 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/491,618 30.07.03 US

14 April 2005 Application Open to Public Inspection

  Published as AU-A-2003284339

13 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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