USING SCATTEROMETRY TO OBTAIN MEASUREMENTS OF IN CIRCUIT STRUCTURES

Details for Australian Patent Application No. 2003284233 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors CHOO, Bryan, K.; SINGH, Bhanwar; SUBRAMANIAN, Ramkumar; RANGARAJAN, Bharath

Pub. Number AU-A-2003284233

PCT Number PCT/US2003/0326

PCT Pub. Number WO2004/038787

Priority 10/277,016 21.10.02 US

Filing date 14 October 2003

Wipo publication date 13 May 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 10/277,016 21.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003284233

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003284234-METHODS OF ASSESSING THE RISK OF REPRODUCTIVE FAILURE BY MEASURING TELOMERE LENGTH

2003284232-STAND-ALONE CIRCLE CIRCUIT WITH CO2 ABSORPTION AND SENSITIVE SPIROMETRY FOR MEASUREMENT OF PULMONARY UPTAKE