HIGH-POWER PULSED MAGNETICALLY ENHANCED PLASMA PROCESSING

Details for Australian Patent Application No. 2003284194 (hide)

Owner ZOND, INC

Inventors CHISTYAKOV, Roman

Pub. Number AU-A-2003284194

PCT Number PCT/US2003/0341

PCT Pub. Number WO2004/040615

Priority 10/065,551 29.10.02 US

Filing date 28 October 2003

Wipo publication date 25 May 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 10/065,551 29.10.02 US

24 June 2004 Application Open to Public Inspection

  Published as AU-A-2003284194

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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