PRODUCING METHOD FOR CRYSTALLINE THIN FILM

Details for Australian Patent Application No. 2003283833 (hide)

Owner CANON KABUSHIKI KAISHA

Inventors KUMOMI, Hideya; YAMAZAKI, Takeo; WATANABE, Masatoshi

Pub. Number AU-A-2003283833

PCT Number PCT/JP2003/0150

PCT Pub. Number WO2004/049412

Priority NO. 2002-343358 27.11.02 JP; NO. 2002-343359 27.11.02 JP; NO. 2002-348004 29.11.02 JP; NO. 2002-348005 29.11.02 JP; NO. 2002-358163 10.12.02 JP

Filing date 26 November 2003

Wipo publication date 18 June 2004

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 013/00 Single-crystal growth by zone-melting

C30B 029/06 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Silicon

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): NO. 2002-343358 27.11.02 JP; NO. 2002-343359 27.11.02 JP; NO. 2002-348004 29.11.02 JP; NO. 2002-348005 29.11.02 JP; NO. 2002-358163 10.12.02 JP

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003283833

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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