METHOD AND APPARATUS FOR MEASURING THICKNESS OF THIN FILMS VIA TRANSIENT THERMOREFLECTANCE

Details for Australian Patent Application No. 2003283772 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors MAZNEV, Alexei

Pub. Number AU-A-2003283772

PCT Number PCT/IB2003/0058

PCT Pub. Number WO2004/055498

Priority 60/433,367 13.12.02 US

Filing date 10 December 2003

Wipo publication date 9 July 2004

International Classifications

G01N 021/17 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Systems in which incident light is modified in accordance with the properties of the material investigated

G01N 021/63 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - optically excited

G01N 029/24 Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves - Probes

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/433,367 13.12.02 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003283772

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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