OPTICAL INSPECTION SYSTEM AND RADIATION SOURCE FOR USE THEREIN

Details for Australian Patent Application No. 2003283767 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors HAVERLAG, Marco; SCHRAM, Daniel, C.; ENGELN, Richard, A., H.; VAN DEN BRANDT, Adrianus, H., J.

Pub. Number AU-A-2003283767

PCT Number PCT/IB2003/0058

PCT Pub. Number WO2004/048950

Priority 02080004.1 28.11.02 EP

Filing date 26 November 2003

Wipo publication date 18 June 2004

International Classifications

G01N 023/225 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

G01B 015/08 Measuring arrangements characterised by the use of wave or particle radiation

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 02080004.1 28.11.02 EP

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003283767

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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