RESISTOR STRUCTURES TO ELECTRICALLY MEASURE UNIDIRECTIONAL MISALIGNMENT OF STITCHED MASKS

Details for Australian Patent Application No. 2003283692 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors AMATO, Joseph, M.

Pub. Number AU-A-2003283692

PCT Number PCT/IB2003/0056

PCT Pub. Number WO2004/055599

Priority 60/433,311 13.12.02 US

Filing date 4 December 2003

Wipo publication date 9 July 2004

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

H01L 023/544 Details of semiconductor or other solid state devices - Marks applied to semiconductor devices, e.g. registration marks, test patterns

G01R 031/316 Arrangements for testing electric properties

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/433,311 13.12.02 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003283692

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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