CHEMICAL VAPOR DEPOSITION OF ORGANOSILICATE THIN FILMS

Details for Australian Patent Application No. 2003282988 (hide)

Owner MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventors BURKEY, Daniel, D.; GLEASON, Karen, K.

Pub. Number AU-A-2003282988

PCT Number PCT/US2003/0334

PCT Pub. Number WO2004/038783

Priority 60/419,904 21.10.02 US

Filing date 21 October 2003

Wipo publication date 13 May 2004

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

C23C 016/50 Chemical deposition or plating by decomposition - using electric discharges

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/419,904 21.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003282988

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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